Scientific Stay of Dr. Matej Fekete at Linköping University

Dr. Matej Fekete has conducted a research stay at Linköping University linked with his MSCAfellow@MUNI project, which focuses on oxynitride thin films. In collaboration with of Prof. Grzegorz Greczynski and the Fundamental Science of Thin Films group, his research addressed hybrid deposition methods and plasma diagnostics using industrial-scale equipment.

22 Oct 2025 Tereza Schmidtová

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Dr. Matej Fekete​, a researcher at PVDLab, the Deposition of Thin Films and Nanostructures research group at the Department of Plasma Physics and Technology and the CEPLANT center, Faculty of Science, Masaryk University, recently participated in a scientific exchange stay at Linköping University (LiU) in Sweden. Dr. Fekete specializes in magnetron sputtering, with a focus on the development of new materials and diagnostics of the deposition process.

His stay, which began in August and continued until October, is linked with Matej Fekete’s ongoing MSCAfellow@MUNI project, which investigates oxynitride thin films. His host was Prof. Grzegorz Greczynski and his Fundamental Science of Thin Films research group at the Department of Physics, Chemistry and Biology at Linköping University. 

At LiU, Dr. Fekete investigated a hybrid deposition process combining dcMS and HiPIMS on an industrial-scale device. As part of the process' diagnostics, he was conducting mass spectrometry measurements to analyze the discharge behavior and plasma composition. During his stay, Dr. Fekete also presented his research  at a Thin Film Physics Division meeting, contributing to the scientific dialogue and strengthening collaboration between Masaryk University and Linköping University. This international exchange supports the development of advanced thin film materials with potential applications in cutting, forming, and energy conversion.  

From the left: Grzegorz Greczynski, Matej Fekete, Sanjay Kumar, Vladyslav Rogoz and Viktor Šroba

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